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Fiber optic displacement sensor for micro‐thickness measurement

H. Ahmad (Department of Physics, University of Malaya, Kuala Lumpur, Malaysia)
M. Yasin (Department of Physics, University of Malaya, Kuala Lumpur, Malaysia and Department of Physics, Airlangga University, Surabaya, Indonesia)
K. Thambiratnam (Department of Physics, University of Malaya, Kuala Lumpur, Malaysia)
S.W. Harun (Department of Physics, University of Malaya, Kuala Lumpur, Malaysia and Department of Electrical Engineering, University of Malaya, Kuala Lumpur, Malaysia)

Sensor Review

ISSN: 0260-2288

Article publication date: 22 June 2012

599

Abstract

Purpose

The purpose of this paper is to propose and demonstrate a simple yet accurate optical fibre based sensor capable of performing micron and sub‐micron thickness measurement.

Design/methodology/approach

The proposed sensor consists of a multimode plastic probe, three He‐Ne lasers and translation stages along with a silicon photodiode and a lock‐in amplifier to measure the output voltage as the displacement of the sensor is increased.

Findings

The system operating with a source wavelength of 633 nm can provide measurements of up to 3 μm with a sensitivity of 0.0054 mV/μm.

Originality/value

The thickness of the sample can be obtained from a linear equation correlating the thickness of the sample to the displacement of the sensor at which the peak output voltage is obtained, or by correlating the thickness of the sample directly to the peak output voltage measured.

Keywords

Citation

Ahmad, H., Yasin, M., Thambiratnam, K. and Harun, S.W. (2012), "Fiber optic displacement sensor for micro‐thickness measurement", Sensor Review, Vol. 32 No. 3, pp. 230-235. https://doi.org/10.1108/02602281211233223

Publisher

:

Emerald Group Publishing Limited

Copyright © 2012, Emerald Group Publishing Limited

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