Design, fabrication and characterization of dielectrophoretic microelectrode array for particle capture

The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution.

The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (F_DEP) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (V_pp) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period.

Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the F_DEP strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 V_pp, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes’ edges.

The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect F_DEP. The presented findings are verified through experimental test and simulation results.