Modern integrated silicon Hall sensors
C. Schott
(Institute for Microsystems, Swiss Federation Institution of Technology (EPFL), Lausanne, Switzerland. Tel: +41 21 693 6774; Fax: +41 21 693 6670; E‐mail: christian.schott@epfl.ch)
F. Burger
(Institute for Microsystems, Swiss Federation Institution of Technology (EPFL), Lausanne, Switzerland. Tel: +41 21 693 6774; Fax: +41 21 693 6670; E‐mail: christian.schott@epfl.ch)
H. Blanchard
(Institute for Microsystems, Swiss Federation Institution of Technology (EPFL), Lausanne, Switzerland. Tel: +41 21 693 6774; Fax: +41 21 693 6670; E‐mail: christian.schott@epfl.ch)
L. Chiesi
(Institute for Microsystems, Swiss Federation Institution of Technology (EPFL), Lausanne, Switzerland. Tel: +41 21 693 6774; Fax: +41 21 693 6670; E‐mail: christian.schott@epfl.ch)
994
Abstract
The new developments in silicon Hall sensors are highlighted. First, basic components made by microelectronic technology are explained. They lead to the development of high accuracy vectorial magnetic probes. Then examples of new applications like angular position sensor and current measurements are illustrated. Finally, new concepts in order to increase the detectivity using magnetic chopping are demonstrated.
Keywords
Citation
Schott, C., Burger, F., Blanchard, H. and Chiesi, L. (1998), "Modern integrated silicon Hall sensors", Sensor Review, Vol. 18 No. 4, pp. 252-257. https://doi.org/10.1108/02602289810240628
Publisher
:MCB UP Ltd
Copyright © 1998, MCB UP Limited