Numerical modeling of 3D intelligent comb drive accelerometer structure: Mechanical models

Abstract

Purpose

This paper aims to focus on the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers.

Design/methodology/approach

The paper focuses on the methods of mechanical design and analysis of electrostatic accelerometers (comb drive structure) and uses computer simulation procedure leading to final structure design, then to be defined as a basic structure for stress analysis.

Findings

The strategy in computer modeling of accelerometer MEMS is satisfactory in order to simulate the electromechanical characteristics of different accelerometer structures (IMEMS).

Originality/value

A novel complex strategy in computer modeling of accelerometer MEMS, based on solid modeling is proposed.

Citation

Wiak, S., Smółka, K., Dems, M. and Komęza, K. (2006), "Numerical modeling of 3D intelligent comb drive accelerometer structure: Mechanical models", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 25 No. 3, pp. 697-704. https://doi.org/10.1108/03321640610666862