Atomic layer deposition and nanoelectromechanical systems (NEMS)

Citation

(2010), "Atomic layer deposition and nanoelectromechanical systems (NEMS)", Microelectronics International, Vol. 27 No. 3. https://doi.org/10.1108/mi.2010.21827cac.001

Atomic layer deposition and nanoelectromechanical systems (NEMS)

Article Type: Conferences and exhibitions From: Microelectronics International, Volume 27, Issue 3

As the nanotechnology industry is still relatively new, a number of gaps exist in the supply chain that are currently prohibiting new electronic products getting to market in an effective manner. Through analysing this supply chain, the gaps can be determined and UK companies can realise the significant commercial gains to be reaped in bridging them.

The Nanotechnology Knowledge Transfer Network (NanoKTN) hosts a number of events in key sectors, to gather data and identify gaps in the supply chain to enable the identification and recommendation of opportunities and commercial benefits to enable UK technology innovators to improve services and increase profit.

Last year the NanoKTN’s first Electronic Devices & Nano Systems focus group event was held at the Rutherford Appleton Laboratory in Didcot. The one-day conference looked at and explored the area of atomic layer deposition, considering new developments in the manufacture of advanced nano-electronic devices such as leading-edge MOS structures, as well as assessing the existing gaps in the supply chain that if not bridged, will prohibit companies from realising the significant commercial gains.

For many of the delegates it was the first opportunity for all the various stakeholders in the supply chain to come together, along with academics, to identify and work towards bridging these gaps.

Suppliers are also searching for new application areas to increase their business, which could probably be found through closer discussions with academics. Unfortunately, too many research projects in universities won’t make it to the manufacturing stage because they are unable to sell the idea or license out the IP. It is then that an obvious gap appears between academia and industry – no willing supply, no commercial demand and little or no communication between the two parties.

This lack of collaboration between UK universities and companies, as well as other sectors of the supply chain, was highlighted at another recent NanoKTN event, focused on Packaging and Integration Challenges for Micro & Nano-enabled Sensors.

The workshop was attended by over 60 delegates ranging from CEOs to Engineers and Marketing personnel and consisted of presentations on topics ranging from applications and challenges to technology, packaging and testing in nano-electronic devices, sensors and systems.

Presentations highlighted the main differences in packaging and handling of Nanoelectromechanical Systems (NEMS) devices compared to other microelectronics devices or opto devices. These presented a number of challenges that required specialised approaches to solve such as the issue of “no touch” areas on NEMS devices, requiring special handling of the chip and also special attention to the packaging and sealing of the device, to prevent the seal compromising the operation of the device. Some devices also need hermetic sealing and custom packages while also needing to be manufactured at low cost, presenting a significant challenge and opportunity for a specialised NEMS and sensor device packaging operation.

Examples were given of commercial successes which all had a common theme in their development; large budget backing, corporate commitment, commitment to overcome large materials issues, ability to focus differently to microelectronics industry sector, and resource to manufacture. Examples included accelerometers/gyros and ink jet print heads.

One area of development for the future was also presented including work done at MIT in the area of Power NEMS including engines, and energy harvesting. Financial models were shown to prove viability for micro-turbine generation sets vs battery power, micro-chemical devices for power generation, microrockets and microhydraulic devices to capitalise on pumped oil to harvest energy from a walking foot soldier.

It is apparent from delegate feedback that industry practitioners are not aware of how the opportunity to collaborate could identify and bridge the gaps they are struggling to fill. It is the general consensus that the UK could be a leader in the implementation of commercial NEMS processes, if the gaps in the basic infrastructure, already present in the UK, are identified and filled.

Through its free membership and discounted events, the NanoKTN aims to bring together and help stimulate the supply chain and encourage more efficient and effective implementation of companies within industry. The focus groups and conferences promote the commercial benefits of establishing an end-to-end supply chain, to enable UK technology innovators to get products to market faster and easier. In doing so, gaps will be identified and recommendations for capitalising on the opportunities these gaps present will be more reachable.

For more information visit: nanopr@mccint.com