Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration: Application to a shunt capacitive MEMS switch

doi:10.1108/03321640410553300

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COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering

ISSN: 0332-1649

Online from: 1982

Subject Area: Electrical & Electronic Engineering

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Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration: Application to a shunt capacitive MEMS switch

Document Information:
Title:	Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration: Application to a shunt capacitive MEMS switch
Author(s):	R.V. Sabariego, (Department of Electrical Engineering and Computer Science (ELAP), University of Liège, Liège, Belgium), J. Gyselinck, (Department of Electrical Engineering and Computer Science (ELAP), University of Liège, Liège, Belgium), P. Dular, (Department of Electrical Engineering and Computer Science (ELAP), University of Liège, Liège, Belgium), J. De Coster, (Department of Electrical Engineering (ESAT-MICAS), Katholieke Universiteit Leuven, Leuven, Belgium), F. Henrotte, (Department of Electrical Engineering (ESAT-ELECTA), Katholieke Universiteit Leuven, Leuven, Belgium), K. Hameyer, (Department of Electrical Engineering (ESAT-ELECTA), Katholieke Universiteit Leuven, Leuven, Belgium)
Citation:	R.V. Sabariego, J. Gyselinck, P. Dular, J. De Coster, F. Henrotte, K. Hameyer, (2004) "Coupled mechanical-electrostatic FE-BE analysis with FMM acceleration: Application to a shunt capacitive MEMS switch", COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, Vol. 23 Iss: 4, pp.876 - 884
Keywords:	Boundary-elements methods, Finite element analysis
Article type:	Technical paper
DOI:	10.1108/03321640410553300 (Permanent URL)
Publisher:	Emerald Group Publishing Limited
Abstract:	This paper deals with the coupled mechanical-electrostatic analysis of a shunt capacitive MEMS switch. The mechanical and electrostatic parts of the problem are modelled by the FE and BE methods, respectively. The fast multipole method is applied to reduce the storage requirements and the computational cost of the BE electrostatic model. An adaptive truncation expansion of the 3D Laplace Green function is employed. The strong interaction between the mechanical and electrostatic systems is considered iteratively.