Online from: 1982
Subject Area: Electrical & Electronic Engineering
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|Title:||Identification of an equivalent model for the permanent magnets of a magnetron sputtering device|
|Author(s):||Daniele Desideri, (Department of Electrical Engineering, University of Padova, Padova, Italy), Alvise Maschio, (Department of Electrical Engineering, University of Padova, Padova, Italy), Dan Doru Micu, (Department of Electrical Engineering, Technical University of Cluj Napoca, Cluj Napoca, Romania), Olivia Ramona Miron, (Department of Electrical Engineering, Technical University of Cluj Napoca, Cluj Napoca, Romania)|
|Citation:||Daniele Desideri, Alvise Maschio, Dan Doru Micu, Olivia Ramona Miron, (2012) "Identification of an equivalent model for the permanent magnets of a magnetron sputtering device", COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering, Vol. 31 Iss: 2, pp.514 - 527|
|Keywords:||2D numerical model, Magnetic devices, Magnetron sputtering, Modelling, Permanent magnets|
|Article type:||Research paper|
|DOI:||10.1108/03321641211200563 (Permanent URL)|
|Publisher:||Emerald Group Publishing Limited|
Purpose – The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source.
Design/methodology/approach – An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements.
Findings – A satisfactory equivalent model has been identified, and validated in several different conditions.
Originality/value – The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.
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