Investigation of the processing effects of UV, heat and laser ablation on SU-8 microturbines: A first approach by small angle neutron scattering

Mark E. Heaton; Massimo Rogante; Adél Len; David Denieffe

doi:10.1108/15736101011080105

Login

Welcome:
Guest

Search for:

Browse:

Product Information:

Resources:

Multidiscipline Modeling in Materials and Structures

ISSN: 1573-6105

Online from: 2005

Subject Area: Mechanical & Materials Engineering

Content: Latest Issue | Latest Issue RSS | Previous Issues

Options: To add Favourites and Table of Contents Alerts please take a Emerald profile

Investigation of the processing effects of UV, heat and laser ablation on SU-8 microturbines: A first approach by small angle neutron scattering

Document Information:
Title:	Investigation of the processing effects of UV, heat and laser ablation on SU-8 microturbines: A first approach by small angle neutron scattering
Author(s):	Mark E. Heaton, (Optical and Semiconductor Devices Group, Electrical and Electronic Engineering Department, Imperial College London, London, UK), Massimo Rogante, (Rogante Engineering Office, Civitanova Marche, Italy), Adél Len, (Research Institute for Solid State Physics and Optics, Budapest, Hungary), David Denieffe, (School of Engineering, Institute of Technology Carlow, Carlow, Ireland)
Citation:	Mark E. Heaton, Massimo Rogante, Adél Len, David Denieffe, (2010) "Investigation of the processing effects of UV, heat and laser ablation on SU-8 microturbines: A first approach by small angle neutron scattering", Multidiscipline Modeling in Materials and Structures, Vol. 6 Iss: 3, pp.364 - 372
Keywords:	Gas flow, Polymers, Turbines
Article type:	Research paper
DOI:	10.1108/15736101011080105 (Permanent URL)
Publisher:	Emerald Group Publishing Limited
Acknowledgements:	Professor Andrew Holmes at Imperial College London is acknowledged for starting the microturbine generator project and allowing the fabrication of turbines samples. Thanks are given also to the Tyndall National Institute, Ireland for imaging time on the samples via the National Access Program. Finally, thanks are given to the EPSRC for the funding allowing the fabrication and development of the microturbine generator device under grant number GR/N18895.
Abstract:	Purpose – The purpose of this paper is to determine the nano-sized characteristics of SU-8 polymer micro-electromechanical systems airflow metrology turbines samples. These microturbines were made to be the first using axial airflow for low air pressure response. This polymer may be affected during curing by UV and heat baking, as well as confined heat from laser ablation. Defects in the resin matrix may influence the material quality and hence the final turbine performance. Design/methodology/approach – Small angle neutron scattering investigations were performed using the instrumentation of the Budapest Research Reactor. Findings – The average sizes of the voids/cracks in the resin matrix of the turbines were determined and allowed the viability of making smaller even thinner rotor blades for higher spin and electrical output capability to be considered. Originality/value – The obtained results have advanced the industrial applicability of the adopted technique in the considered sector of polymer analysis.