Design and optimization of a low voltage RF switch MEMS capacitance using genetic algorithm and Taguchi method
ISSN: 0305-6120
Article publication date: 7 May 2019
Issue publication date: 21 June 2019
Abstract
Purpose
This paper aims to design, optimize and simulate the Radio Frequency (RF) micro electromechanical system (MEMS) Switch which is stimulated by electrostatically voltage.
Design/methodology/approach
The geometric structure of the switch was extracted based on the design of Taguchi-based experiment using the mathematical programming and obtaining objective function by the genetic meta-heuristic algorithm.
Findings
The RF parameters of the switch were calculated for the design of Taguchi-based S11 = −5.649 dB and S21 = −46.428 dB at the working frequency of 40 GHz. The pull-in voltage of the switch was 2.8 V and the axial residual stress of the proposed design was obtained 28 MPa and the design of Taguchi-based S11 = −4.422 dB and S21 = −48.705dB at the working frequency of 40 GHz. The pull-in voltage of the switch was 2.5 V and the axial residual stress of the proposed design was obtained 25 MPa.
Originality/value
A novel complex strategy in the design and optimization of capacitive RF switch MEMS modeling is proposed.
Keywords
Acknowledgements
Corrigendum: It has come to the attention of the publisher that the article Ardehshiri, A., Karimi, G. and Dehdasht-Heydari, R. (2019), “Design and optimization of a low voltage RF switch MEMS capacitance using genetic algorithm and Taguchi method”, published in Circuit World, Vol. 45 No. 2, pp. 53-64 was simultaneously submitted to another journal for consideration.
The paper was significantly similar to a submitted work by the authors to another journal. They did not notify the Editor-In-Chiefs of the other journal or Circuit World of the simultaneous submission; nor did they inform the other journal that they did not wish for their submission to proceed to publication in the journal. The paper submitted to the other journal will not be published.
The author guidelines for Circuit World clearly state that articles must be original, fully referenced and not under consideration elsewhere. The authors sincerely apologise for this.
Citation
Ardehshiri, A., Karimi, G. and Dehdasht-Heydari, R. (2019), "Design and optimization of a low voltage RF switch MEMS capacitance using genetic algorithm and Taguchi method", Circuit World, Vol. 45 No. 2, pp. 53-64. https://doi.org/10.1108/CW-02-2019-0014
Publisher
:Emerald Publishing Limited
Copyright © 2019, Emerald Publishing Limited