Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine

Abstract

Purpose

The purpose of this paper is to develop the multi‐degree‐of‐freedom measurement system to test, verify, and control the nano‐measuring machine.

Design/methodology/approach

A generic differential model approach is constructed to numerically describe the hysteresis effects of piezoelectric actuators. Based on the generic differential model, a feedforward compensator with a proportional integral (PI) type controller is designed to compensate for the hysteresis nonlinearity of a piezoelectric actuated three degree‐of‐freedom coplanar nanostage which can provide high‐precision applications.

Findings

The Z‐tilts (z, pitch, and roll motion) error compensation stage of the nano‐measuring machine is accomplished. Moreover, a high‐resolution laser interferometer is used to measure position accurately.

Originality/value

This paper contributes to develop a tracking control design method for the piezoelectric motion platform which combines a closed‐loop feedforward compensator with a PI type controller.

Citation

Liu, V., Liu, C., Li, H., Chen, C., Lin, C. and Lin, Y. (2010), "Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine", Kybernetes, Vol. 39 No. 6, pp. 1029-1039. https://doi.org/10.1108/03684921011046807