Thick/thin film thermocouples as power source for autonomous microsystems – preliminary results

Abstract

Purpose

Possible application of mixed (thick/thin film) thermopiles to supply autonomous microsystems.

Design/methodology/approach

PdAg/AG or PdAg/TSG thermocouples were deposited onto a circular alumina or LTCC substrates. Their thermoelectric power, resistance as well as output electrical power were characterized vs temperature gradient and chosen parameters of thermopile fabrication process.

Findings

Semiconductors have high Seebeck coefficient, so investigated kind of thermopile has high output electrical power E_T. It achieves 50 mV per single junction for temperature difference of about 200°C.

Research limitations/implications

The problem is very high resistivity of germanium alloys, even after burn‐in process. Therefore output electrical power P is seriously reduced. To improve thermocouples properties, optimization process is required. For example, thin film layers quality can be improved, semiconductive arms width can be increased or shorter arms can be used.

Originality/value

Application of mixed thick/thin film technology for fabrication of miniaturized thermoelectric generators.

Citation

Markowski, P., Dziedzic, A. and Prociow, E. (2005), "Thick/thin film thermocouples as power source for autonomous microsystems – preliminary results", Microelectronics International, Vol. 22 No. 2, pp. 3-7. https://doi.org/10.1108/13565360510592153