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Coupling effects of the impact factors in micro-scale on the performance of aerostatic guideway

Dongju Chen (Beijing Key Laboratory of Advanced Manufacturing Technology, Beijing University of Technology, Beijing, China)
Lihua Dong (Beijing Key Laboratory of Advanced Manufacturing Technology, Beijing University of Technology, Beijing, China)
Ri Pan (Beijing Key Laboratory of Advanced Manufacturing Technology, Beijing University of Technology, Beijing, China)
Jinwei Fan (Beijing Key Laboratory of Advanced Manufacturing Technology, Beijing University of Technology, Beijing, China)
Qiang Cheng (Beijing Key Laboratory of Advanced Manufacturing Technology, Beijing University of Technology, Beijing, China)

Industrial Lubrication and Tribology

ISSN: 0036-8792

Article publication date: 27 June 2018

Issue publication date: 9 July 2018

116

Abstract

Purpose

The purpose of this study is to investigate the coupling effects of the velocity slip, rarefaction effect and effective viscosity of the gas film on the performance of the aerostatic guideway in micro-scale and improve the analysis precision of the static performance of aerostatic guideway.

Design/methodology/approach

The corresponding model of the gas film flow with consideration of the velocity slip, rarefaction effect and effective viscosity of the gas film in micro-scale is proposed. By solving the corresponding model, the bearing capacity and the stiffness of the aerostatic guideway are obtained through the pressure distributions of the air cavity. Through comparing the bearing capacity and the stiffness in different situations, the couple effects of the three factors are analyzed. Finally, the experimental results about the stiffness are obtained and the contrast between the simulation stiffness and the tested stiffness is achieved.

Findings

Through comparing the coupling effects of the micro scale factors under different conditions on the performance of the aerostatic guideway, it was found that when comparing the effects of a single factor, the effect of the first-order slip is the largest. When two factors are randomly combined, velocity slip and viscosity of the gas film is the largest, but these coupling effects are less than the effect of considering three factors simultaneously.

Originality/value

It is essential to consider the first-order velocity slip, the flow factor Q and the effective viscosity when analyzing the static performance of the aerostatic guideway in micro-scale. This makes studying the performance of the aerostatic guideway in micro-scale feasible and improves the machine’s accuracy.

Keywords

Acknowledgements

This research was funded by the National Natural Science Foundation of China Grant No. 51475010, Beijing Nova program (Z161100004916156), Natural Science Foundation of Beijing Municipality Grant No.3142005 and Ultra-precision Machining technology Key Laboratory Major Fund of China Academy of Engineering Physics (ZZ14002).

Citation

Chen, D., Dong, L., Pan, R., Fan, J. and Cheng, Q. (2018), "Coupling effects of the impact factors in micro-scale on the performance of aerostatic guideway", Industrial Lubrication and Tribology, Vol. 70 No. 5, pp. 846-855. https://doi.org/10.1108/ILT-01-2017-0020

Publisher

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Emerald Publishing Limited

Copyright © 2018, Emerald Publishing Limited

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