Keywords
Citation
Rigelsford, J. (2003), "Motion compensation system", Industrial Robot, Vol. 30 No. 4. https://doi.org/10.1108/ir.2003.04930dad.008
Publisher
:Emerald Group Publishing Limited
Copyright © 2003, MCB UP Limited
Motion compensation system
Motion compensation system
Keywords: Robot, Motion, Patents
Applicant: Genmark Automation, Inc., USAPatent number: US6,489,741Publication date: 3 December 2002Title: Robot Motion Compensation System
A robot for handling substrates is described. The substrate may be a semiconductor wafer, a LCD panel or an end effector of the robot arm.
The present invention overcomes the deficiencies of other designs by actively compensating for inaccuracies and deflections encountered during the travel path of the robot arm. The elevation and planar velocity components of robot arm motion are synchronized during the extension and retraction of the robot arm such that the trajectory of the substrate is made coincident with the object axis of the substrate. Mechanical and other imperfections can be compensated for, which would otherwise cause deviations from an ideal path. The synchronized motion is achieved using a controller issuing control signals to arm actuating means based on synchronization algorithms developed during the analytical or experimental robot learning sessions.