Alio's tripod and hexapod micro positioners are precisely aimed at nano positioning applications

Citation

(2007), "Alio's tripod and hexapod micro positioners are precisely aimed at nano positioning applications", Industrial Robot, Vol. 34 No. 6. https://doi.org/10.1108/ir.2007.04934fad.002

Alio's tripod and hexapod micro positioners are precisely aimed at nano positioning applications

Alio's tripod and hexapod micro positioners are precisely aimed at nano positioning applications

Nano positioning manipulators use parallel kinematics for superior positioning control

With backlash free resolutions to 5nm, speeds to 200mm/sec and an effective positioning envelope between 15mm³ and 200mm³, Alio Industries three- and six-degrees of freedom tripod and hexapod (Figure 2) robotic manipulators provide the enabling technology for demanding ultra-high precision motion systems.

Figure 2 Alio's new nano positioning manipulators give superior positioning control

Used as nano positioners for production, test and research applications in photonics, semiconductor, MEMS and many other high technology industries, Alio's AI series tripods and hexapods, available exclusively in the UK from Heason Technologies, combine parallel kinematics principles with ceramic servo motors and high resolution encoder feedback systems. Smooth and precise linear motion and total rigidity of each positioning element is assured with ultra-precision cross roller bearing based mechanics. The micro positioner features Hephaist^® spherical rolling joints at both the support base and the moving table ensuring backlash-free performance.

Standard equipment for the complete range includes Delta Tau motion controllers with forward and inverse kinematics, and interpolation algorithms built-in; users simply program the actual position of a “tool centre point” as individual position coordinates or as contoured moves. The tool centre point is simply positioned anywhere within the positioning envelope in X Y Z coordinates.

Parallel kinematics micro positioners provide extremely rigid platforms with increased repeatability over traditional serial kinematics stacked linear and rotary stages where runout and tilt errors are prone to accumulate. The Alio AI hexapod and tripod also allows simpler cabling for motor, feedback and other services and the lower inertia design has faster acceleration performance and very often a smaller footprint and overall envelope.

The load carrying capability for the AI hexapod is from 0.25kg to 20kg (up to 8kg for the tripod version). Both designs have a repeatability of just 50nm as standard which may be upgraded to 10nm with an optional low-noise DC mode amplifier.

Alio Industries can provide customised designs and application software including a Windows^® PC with robotic GUI and all units may be supplied to class 10 or class 100 compatible clean room standards or with 10¹⁰ Torr vacuum preparation.

For further information, please visit the web site: www.heason.com