Citation
(2002), "Source of light", Work Study, Vol. 51 No. 6. https://doi.org/10.1108/ws.2002.07951fab.013
Publisher
:Emerald Group Publishing Limited
Copyright © 2002, MCB UP Limited
Source of light
Source of light
Cymer, Inc., the world's leading supplier of excimer light sources used in semiconductor manufacturing, has achieved a major milestone by securing more than $40 million total in orders for its newest excimer light source – the ELS-7000. Developed in anticipation of market demand, the ELS-7000 fulfills lithography tool manufacturers' need for a highly line-narrowed, high-power, krypton fluoride (KrF) excimer light source that will allow them to improve throughput and reduce operating costs at the 248nm wavelength. The most advanced KrF product in Cymer's current portfolio, the ELS-7000, is also the industry's leading KrF product. Operating at a 4kHz repetition rate and 30W output power, the ELS-7000 can support the highest scan speeds for maximum productivity and wafer throughput. For more, see http://www.cymer.com/